Source Measure Units (SMUs)

Source-Measure Units and Current-Voltage SourceMeter Instruments

Keithley Pioneered SMU development over 20 years ago

Today, our award-winning SMU instruments and systems have evolved into seven distinct product families designed to keep pace with your evolving test requirements.

2600B System SourceMeter® SMU Instruments

Model 2612A Dual-channel System SourceMeter Instrument (200V, 10A Pulse)

Family of dual- or single-channel models with I-V capability from 10A pulse to 0.1fA and 200V to 100nV

TSP® (Test Script Processor) technology for best-in-class throughput and lowest cost of test

Browser-based GUI enables testing on any PC from anywhere in the world

Model 2604B pictured on right. Click image to view rest of 2600B Series

2400 SourceMeter® SMU Instruments

Model 2401 Low Voltage SourceMeter Instrument

Family of single-channel models with I-V capability from 1100V to 100nV and 10.5A pulse to 1pA

Smart alternative to separate Power Supplies and Digital Multimeters (DMMs)

Convenient DMM-like user interface

Model 2401 pictured on right. Click image to view rest of 2400 Series

S530 Parametric Test systems

High-speed semiconductor parametric testing with low cost of ownership

Designed for production and lab environments managing a broad range of devices and product wafers

Proven SMU instrumentation technology ensures high measurement accuracy and repeatability

2650A High Power System SourceMeter® SMU Instruments

Model 2657A High Power System SourceMeter Instrument with up to 180W of DC or pulsed power (+/-3000V@20mA, +/-1500V@120mA)

Source and measure up to 3kV or 50A pulse, with best-in-class low current resolution

Up to 2000W pulse or 200W DC power

Optimized for characterizing and testing high power semiconductors,electronics, and materials

Model 2657A pictured on right. Click image to view rest of 2650A Series

S500 Integrated Test Systems

Highly configurable and scalable SMU instrument-based system

Semiconductor device testing along with Automated Characterization Suite (ACS) at the device, wafer, or cassette level

Ideal for SMU-per-pin Wafer Level Reliability (WLR) testing, high speed parallel test, die sort, and Process Control Monitoring (PCM)

High Power Curve Tracer Solutions

3 kV/100A high power characterization

Full range of C-V capability

Low start-up cost and expandable when funding allows

Reconfigure your test system as requirements change

Comprehensive software to easily characterize power devices

User-modifiable application tests makes it easy to make complicated measurements

4200-SCS Parameter Analyzer

Fully integrated I-V, C-V and Pulse in one analyzer

Configured to meet your test needs, flexible for tomorrow’s ever changing requirements

Intuitive software to easily set up tests and capture/analyze data

Ultra-fast I-V modules synchronized for transient, waveform capture and pulsed I-V capabilities

Over 450 user-modifiable application tests makes it easy to make complicated measurements

Prober and temperature controller drivers

Wide range of source measure units (SMU) and precision power supplies for current/voltage source/measure capability.

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